Kim, E. b. T. S. t. b. H. Applications of plasma processes to VLSI technology. John Wiley and Sons.
Chicago Style CitationKim, Edited by Takuo Sugano translated by Hyo-Gun. Applications of Plasma Processes to VLSI Technology. John Wiley and Sons.
MLA CitationKim, Edited by Takuo Sugano translated by Hyo-Gun. Applications of Plasma Processes to VLSI Technology. John Wiley and Sons.
Warning: These citations may not always be 100% accurate.