RUSKA, W. S. (1987). Microelectronic processing. An introduction to the manufacture of integrated circuit. McGraw - Hill Book Company.
Chicago Style CitationRUSKA, W Scot. Microelectronic Processing. An Introduction to the Manufacture of Integrated Circuit. McGraw - Hill Book Company, 1987.
MLA CitationRUSKA, W Scot. Microelectronic Processing. An Introduction to the Manufacture of Integrated Circuit. McGraw - Hill Book Company, 1987.
Warning: These citations may not always be 100% accurate.