Applications of plasma processes to VLSI technology
| Main Author: | Edited by Takuo Sugano translated by Hyo-Gun Kim |
|---|---|
| Format: | TEXT |
| Published: |
John Wiley and Sons
|
| Subjects: |
| id |
kulonprogolib-16377 |
|---|---|
| recordtype |
oai_dc |
| spelling |
kulonprogolib-163772016-08-08 00:00:00Perpusda Kabupaten Kulon ProgoApplications of plasma processes to VLSI technology Edited by Takuo Sugano translated by Hyo-Gun KimSemikonduktor John Wiley and Sons TEXT |
| institution |
Perpusda Kabupaten Kulon Progo |
| collection |
Perpustakaan Yogyakarta |
| topic |
Semikonduktor |
| spellingShingle |
Semikonduktor Edited by Takuo Sugano translated by Hyo-Gun Kim Applications of plasma processes to VLSI technology |
| description |
|
| format |
TEXT |
| author |
Edited by Takuo Sugano translated by Hyo-Gun Kim |
| author_sort |
Edited by Takuo Sugano translated by Hyo-Gun Kim |
| title |
Applications of plasma processes to VLSI technology |
| title_short |
Applications of plasma processes to VLSI technology |
| title_full |
Applications of plasma processes to VLSI technology |
| title_fullStr |
Applications of plasma processes to VLSI technology |
| title_full_unstemmed |
Applications of plasma processes to VLSI technology |
| title_sort |
applications of plasma processes to vlsi technology |
| publisher |
John Wiley and Sons
|
| publishDate |
|
| _version_ |
1547778748934258688 |
| score |
14.79448 |