Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access)
| Main Author: | Paik , Ungyu |
|---|---|
| Format: | eBook |
| Language: | Bahasa Inggris |
| Published: |
Taylor and Francis
2009
|
| Subjects: | |
| Online Access: |
http://oaipmh-jogjalib.umy.ac.idkatalog.php?opo=lihatDetilKatalog&id=100457 |