Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access)
| Main Author: | Paik , Ungyu |
|---|---|
| Format: | eBook |
| Language: | Bahasa Inggris |
| Published: |
Taylor and Francis
2009
|
| Subjects: | |
| Online Access: |
http://oaipmh-jogjalib.umy.ac.idkatalog.php?opo=lihatDetilKatalog&id=100457 |
| id |
oai:lib.umy.ac.id:100457 |
|---|---|
| recordtype |
oai_dc |
| spelling |
oai:lib.umy.ac.id:1004572021-06-16T13:13:43ZNanoparticle Engineering for Chemical-Mechanical Planarization (Open Access)Paik , UngyuOn Atypon, ENGnetBASE, NANOnetBASE, ElectricalEngineeringnetBASE, CHEMLIBnetBASE, SCITECHnetBASE, CHEMICALENGINEERINGnetBASE, STMnetBASETaylor and Francis2009eBookeBookBahasa Inggrishttp://oaipmh-jogjalib.umy.ac.idkatalog.php?opo=lihatDetilKatalog&id=100457 |
| institution |
Universitas Muhammadiyah Yogyakarta |
| collection |
Perpustakaan Yogyakarta |
| language |
Bahasa Inggris |
| topic |
On Atypon, ENGnetBASE, NANOnetBASE, ElectricalEngineeringnetBASE, CHEMLIBnetBASE, SCI TECHnetBASE, CHEMICALENGINEERINGnetBASE, STMnetBASE |
| spellingShingle |
On Atypon, ENGnetBASE, NANOnetBASE, ElectricalEngineeringnetBASE, CHEMLIBnetBASE, SCI TECHnetBASE, CHEMICALENGINEERINGnetBASE, STMnetBASE Paik , Ungyu Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access) |
| description |
|
| format |
eBook |
| author |
Paik , Ungyu |
| author_sort |
Paik , Ungyu |
| title |
Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access) |
| title_short |
Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access) |
| title_full |
Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access) |
| title_fullStr |
Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access) |
| title_full_unstemmed |
Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access) |
| title_sort |
nanoparticle engineering for chemical-mechanical planarization (open access) |
| publisher |
Taylor and Francis |
| publishDate |
2009 |
| url |
http://oaipmh-jogjalib.umy.ac.idkatalog.php?opo=lihatDetilKatalog&id=100457 |
| isbn |
eBook |
| _version_ |
1702758279520714752 |
| score |
14.79448 |