Calculation of the reactor Impedance of a Planar-type Inductively Coupled Plasma Source
| Main Author: | Deuk-Chul Kwon, Bong-Sam Jung, Nam-Sik Yoon |
|---|---|
| Format: | Jurnal |
| Language: | Bahasa Inggris |
| Published: |
Journal of Electrical Engineering and Tekhnolog
2012
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| Subjects: | |
| Online Access: |
http://oaipmh-jogjalib.umy.ac.idkatalog.php?opo=lihatDetilKatalog&id=61030 |